XYTxTyZ- Eucentric sample manipulator, high stability & resolution
Description - XYTxTyZ - Eucentric sample manipulator
with high stability & resolution |
The stage is designed to accommodate a sample manipulation for variety of surface analysis techniques for quantitative surface spectrometry and microscopy including XPS,XPEEM, LEEM SIMS with sample at ground potential and biased to high voltages. It operates with eucentric tilt to accommodate quantitative analysis and microscopy. Ideal for vacuum robotics with micro-scale accuracy.
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| GALLERY - XYTxTyZ - Eucentric sample manipulator |
| Specification - XYTxTyZ - Eucentric sample manipulator |
| Type of sample manipulation |
5 axis sample manipulation with eucentric tilt adjustment |
| Control Management |
- Fully computer controlled through USB as standard
- Standard control software |
| Travel -X,Y axes |
+- 5 mm |
| Travel -Z axis |
+- 10 mm |
| Travel -Tilt TxTy |
+- 2 deg |
| Resolution -X,Y- axes |
+- 0.2 um |
| Resolution -Z- axis |
+-2 um |
| Sample isolation |
20 kV, (optional 30 kV) |
| Mounting |
6” and 8” flange versions are available |
| Construction Features - XYTxTyZ - Eucentric sample manipulator
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| Mounting |
Mounted on CF38 |
| Contruction Type |
Modular |
| Accessibility |
Standardized connector for filament supply and Lens system |
| Working distance |
10-20 mm |
